Dry etch process development
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Iam having very good experience in Dry etching characterization and process development. I have more than 32 years experience in dry etching. Worked almost all technology (>90nm). Acquired good knowledge in etching all types of film ( Al,Si,SiO2,GaN, Si3N4,TiN, TaN,Al2O3). Also worked in different technology like CMOS, Power MOS, Trench MOS, Silicon photonics device, GaN, SiC, BiCMOS etc. Currently working in Glolbalfoundries Singapore.
Good experience in dry etch process characterization of almost all films.
Developed processes for 0.6um /0.35 process for EEPROM, BiCMOS, Logic for ll layers
Developed dry etch processes for 0.25, 0.13, 0.09um process for all layers
Good experience in both Al and Cu process ( Logic as well as RF products)
All projects completed in schedule time
BTech in Electrical engineering Govt. Engineering Trichur, Kerala , India (1987)
MTech in Microelectronics IIT Madras, India (19189)
